NNIN Etch Workshop
Site Updates |
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Cornell NanoScale Facility (CNF) | Dry Etch Capabilities | |
UCSB Nanofabrication Facility | Dry Etch at UCSB | |
Georgia Institute of Technology | Plasma Etch Equipment | |
Harvard University | Etching Cababilites at Harvard | |
Arizona State University (ASU) | ASU NanoFab | |
Penn State | Materials Research Nanofabrication Facility | |
University of Minnesota | Etching Systems | |
University of Michigan (LRF) | LNF Equipment Overview | |
Standford Nanofabrication Facility (SNF) | Etch Area Overview | |
University of Texas at Austin | Dry Etching Capabilities | |
University of Washington | UW MFF Dry Etch Equipment | |
University of Colorado Boulder | Etch Capability at CNL | |
Washington University in St. Louis (WUSTL) | Etching Capabilities | |
Howard | N/A | |
Selected Talks on Advanced Etch Processes |
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Dielectric Etching at the NanoScale | Vincent Genova | Cornell University |
Silicon Nanowire Etching | Ling Xie | Harvard University |
Dry Etching of III-V and Silicon Based Materials | Ning Cao | UCSB |
Deep Glass Etching | Kevin Owen | University of Michigan |