National Nanotechnology Infrastructure Network

National Nanotechnology Infrastructure Network

Serving Nanoscale Science, Engineering & Technology

NNIN Etch Workshop

NNIN Etch Workshop Day 1: Tuesday, May 21st, 2013

Site Updates

Cornell NanoScale Facility (CNF) Dry Etch Capabilities
UCSB Nanofabrication Facility Dry Etch at UCSB
Georgia Institute of Technology Plasma Etch Equipment
Harvard University Etching Cababilites at Harvard
Arizona State University (ASU) ASU NanoFab
Penn State Materials Research Nanofabrication Facility
University of Minnesota Etching Systems
University of Michigan (LRF) LNF Equipment Overview
Standford Nanofabrication Facility (SNF) Etch Area Overview
University of Texas at Austin Dry Etching Capabilities
University of Washington UW MFF Dry Etch Equipment
University of Colorado Boulder Etch Capability at CNL
Washington University in St. Louis (WUSTL) Etching Capabilities
Howard N/A
 
NNIN Etch Workshop Day 2: Wednesday, May 22nd, 2013

Selected Talks on Advanced Etch Processes

Dielectric Etching at the NanoScale Vincent Genova Cornell University
Silicon Nanowire Etching Ling Xie Harvard University
Dry Etching of III-V and Silicon Based Materials Ning Cao UCSB
Deep Glass Etching Kevin Owen University of Michigan