 |
Nanofabrication Lab
Penn State University
University Park, PA
Expertise: Materials and chemical technologies at the molecular scale with unique
strengths that include surface chemistry, self-assembly, and the
fabrication and processing of complex oxide materials. 
The Penn State Nanofab provides users with 24/7 open-access to
facilities that enable fabrication of a wide range of devices and
characterization to support fundamental and applied research in diverse
fields spanning electronics to medicine.
Academic and industry users can perform research on-site using facility equipment, training, and staff support. The technical staff can also provide “remote services” in which they do your research for you. The Penn State facilities consist of
approximately 6000 square feet of clean room space and over 3000 square
feet of supporting non-clean lab space that is located at our Materials
Research Institute (MRI), Materials Research Laboratory (MRL), and
Electrical Engineering West (EEW) Buildings. The largest laboratory in
MRI contains clean process bays and adjoining semi-clean cluster areas
that support all aspects of deposition and etching, micro- and
nanolithography, and process metrology equipment. The second Keck
Smart Materials Laboratory cleanroom in MRL contains several
instruments specialized for complex ferroelectric oxide materials
processing, which includes oxide thin film deposition (e.g., PZT, PLZT,
SrTiO3, BaTiO3, etc.) and metal contact sputter deposition. The third
lab in EEW contains additional process bays that support specialized
MEMS processing systems for silicon and ferroelectric oxide device
fabrication, which include new deep silicon and oxide reactive ion etch
(RIE) tools and a XeF2 silicon release etch tool.
The Penn State Nanofab is part of the Materials Research Institute’s
shared user facilities which also includes the Materials
Characterization Lab (MCL). MCL is a fully staffed analytical laboratory that offers researchers convenient and affordable access to a wide range of state-of-the-art  analytical instrumentation which complements the Nanofab tool sets.
The Nanofab is one of the NNIN sites that hosts both the Research Experience for Undergraduates (REU) and the Research Experience for Teachers (RET) programs.
For more information contact:
Jaime Reish
Administrative Coordinator (814) 865-7348
Email
or visit the website at:
www.mri.psu.edu/facilities/NNIN
|
 |